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finite element method simulator comsol multiphysics 3.3  (COMSOL Inc)

 
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    COMSOL Inc finite element method simulator comsol multiphysics 3.3
    Finite Element Method Simulator Comsol Multiphysics 3.3, supplied by COMSOL Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/result/finite element method simulator comsol multiphysics 3.3/product/COMSOL Inc
    Average 90 stars, based on 1 article reviews
    finite element method simulator comsol multiphysics 3.3 - by Bioz Stars, 2026-04
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    Material parameters used in COMSOL 3.3 finite element simulations.

    Journal: The Review of Scientific Instruments

    Article Title: High speed wafer scale bulge testing for the determination of thin film mechanical properties

    doi: 10.1063/1.3427493

    Figure Lengend Snippet: Material parameters used in COMSOL 3.3 finite element simulations.

    Article Snippet: Material parameters used for computer simulations are shown in Table . table ft1 table-wrap mode="anchored" t5 Table 2 caption a7 Simulation parameter Value Modulus Si 3 N 4− x (GPa) 297 Si 3 N 4− x residual stress (MPa) 311±7 Modulus Al (GPa) 79 Membrane width (μm) 350–1200 Si 3 N 4− x thickness (nm) 720 Al thickness (nm) 20 Open in a separate window Material parameters used in COMSOL 3.3 finite element simulations.

    Techniques: Membrane